What’s tiny and on track to be worth $22 billion dollars by 2018? MEMS (Micro Electrical Mechanical Systems). That’s a catch-all phrase for microscopic devices that have moving parts.

MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip. These ...

and this time he found a way to fabricate arrays of microscopic lenses as a result. Like many of the best projects, [Zach]’s journey into micro-fabrication started with a happy accident.

A recent study published in Micromachines introduces a micro-electromechanical system (MEMS) that leverages near-infrared ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized ... Our recent work has fabricated hemispherical ...