These are usually seen in tiny MEMS devices, and now we have tiny ... For [Nathann]’s Hackaday Prize entry, he’s building electrostatic actuators on the cheap, and not just tiny ones, either.

The revolution in MEMS has resulted directly from semiconductor fab technologies, facilitating precision mass production at ...

MEMS are mechanical sensors and actuators that are fabricated using micromachining batch technologies similar to those used for integrated circuits. This translates into highly scalable production ...

The eidophor used electrostatic charge to locally deform ... Figure 2: BMC's 4,092-actuator MEMS DM for the Gemini Planet Imager. BMC also produced the first MEMS DMs to be used in civilian ...

Menlo Micro has released another MEMS electro-mechanical relay ... Contact movement is though electrostatic attraction, with the necessary voltage generated by an integrated charge pump. Also ...