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Tech Xplore on MSNNovel transparent ceramics extend life of semiconductor etching equipmentSenior Researcher Ho Jin Ma from KIMS stated, "In semiconductor processes, plasma etching is dominated by materials, components, and equipment from the U.S. and Japan, which account for over 90% ...
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Plasma technique doubles etch rate for 3D NAND flash memoryTo store ever more data in electronic devices of the same size, the manufacturing ... semiconductor material to be processed––at a low temperature. This emerging approach is called cryo etching.
According to Lam Research, this etching equipment supports next-generation semiconductor manufacturing processes ... semiconductor devices," adding that "plasma etching technology will play ...
The chemical etching process he used is a bit fussy, and prone to undercutting of the mask if the etchant seeps underneath it. As its name implies, RIE uses a plasma of highly reactive ions to do ...
Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure The PlasmaPro 100 Cobra ICP RIE system ...
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