MEMS are mechanical sensors and actuators that are fabricated using micromachining batch technologies similar to those used for integrated circuits. This translates into highly scalable production ...

Around that time, another technology that was emerging rapidly was microelectromechanical systems (MEMS) — tiny sensors and actuators fabricated from silicon wafers using thin-film processing ...

MEMS Actuators; MEMS Sensors; Design Simulation and Optimization of MEMS Devices; Microfabrication Process Consultation of MEMS Devices MEMS Device Prototyping; ...

and actuator structures, e.g., micromirrors, liquid and gas valves, pumps, etc. A related area of interest is the development of low-temperature MEMS structural materials and localized annealing ...

Piezoelectric microelectromechanical sensors and actuators are used in a wide variety of applications. Compared to traditional capacitive MEMS, piezoelectric MEMS deliver superior performance and ...