Different diagrams are used for varying levels of detail and complexity, such as block diagrams, flow diagrams, piping and instrumentation diagrams (P&IDs), and logic diagrams.

This paper analyzed four different structures of flow sensor, the rectangular membrane cantilever beam array structure, the trapezoidal membrane cantilever beam array structure, the inverted ...

MEMS sensors are promising for Energy Efficient Building (EeB) because of the potential low cost and low power consumption. Various flow sensors based on MEMS technology have been fabricated. In this ...